- TAZMO Analects
Device which moves the wafer primary flat or notch to the user’s specified position. (The Pre-aligners to adjust an angle and to determine the center of wafer are also available.)
Check the wafer in the cassette.
A continuous, non-digital representation of phenomena. An analog voltage, for example, may take any value.
れーるれすこうぞう Rail-less structure
Rectangular movement is possible, so it is possible to access the cassette arranged in parallel without rail.
ようせつべろーずしーるほうしき Welded bellows (Seal)
Seal the air and vacuum of the Z axis.
Jet clean air at the back side of the wafer and float it to clamp the edge.
ぶらんちあーむこうぞうBranch arm structure
To minimize the revolving diameter, two arms with end effectors branches at elbow axis of base arm. This enables faster transfer compare to single arm and less space compare to double arm.
ふりーあくせすろぼっと Free access robot
The robot which moves in both X and Y axis directions
Revolving axis of changer, or revolving axis of reverse mechanism
ぱーてぃくるふりーはんそうParticle free transportation
No particles are generated on the wafer by transportation in download flow environment about 300mm/sec.