NTWR-2

This transfer robot handles wafer sizes up to 200mm.

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Features

  • Mapping sensor availables as an optin.
  • Adopted air-tight Ferromagnetic fluid sealing.
  • Class 1 particle-free robot (exhaust duct type)
  • Z-axis is built in, and requires no cassette elevator.
  • Compact design:smallest and lightest in the class.
  • Enables fast smooth transferring with 5-phase stepping motor ans optimum acceleration control.
  • Achieved excellent rectilinearity of the arms with high rigidity ans unique drive system.

Specifications

Handling object

φ100mm to φ200mm SEMI/JEIDA standard wafer.

(Please inquire with regard to special wafers such as glass wafers.)

Range of motion

R1,R2:250㎜(maximum arm reach,excluding end-effector)
T:340°(±170° from Home pos)

Z:300㎜

Repeatability

R1,R2:±0.1mm or less(3σ)

T:±0.05deg or less(3σ)
Z:±0.1mm or less(3σ)

Wafer holding method Selectable from options
Wafer hold check Vacuum sensor with digital display
Communication RS232C,RS-485
Utility

Driver power:DC24V±5% 8A

Control power:DC24V±5% 3.15A 

Vacuum:-80 kPa or less 15L/min or less 1line

(φ6 × φ4 polyurethane tube one-touch fitting connected)

Mass

Main body:Appox.25kg

Controller(NT*R):Appox.5kg

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