NQS-1
This high-speed, ultra-clean robot is TAZMO standarad model of single-arm 300mm wafer transfer robot.
Features
- Servo motor on all axes sine-curve motion profiling for smooth transfers at high-speed and high-accuracy.
- Mapping sensor availables as an optin.
Specifications
| Handling object |
φ100mm to φ300mm SEMI/JEIDA standard wafer. (Please inquire with regard to special wafers such as glass wafers.) |
|---|---|
| Range of motion |
R1：348㎜(maximum arm reach,excluding end-effector) Z：330㎜ |
| Repeatability |
R1：±0.1mm or less（3σ) T:±0.05mm or less（3σ) |
| Wafer holding method | Selectable from options |
| Wafer hold check | Vacuum sensor with digital display |
| Communication | RS232C,RS0485 |
| Utility |
Power：1φ AC100V 7.5A 1line :1φ AC208V 5.0A 1line Vacuum：-80 kPa or less 1line (φ6 × φ4 polyurethane tube one-touch fitting connected) |
| Mass |
Main body:Appox.38kg Controller(MCQ)：Appox.18kg |
Contact us for questions about products.
