Features
- Mapping sensor availables as an optin.
- Accesses two FOUPs without trackes.
- Optimized software for maximum space saving. Space-saving, built-in controller.
Specifications
| Handling object |
φ100mm to φ300mm SEMI/JEIDA standard wafer. (Please inquire with regard to special wafers such as glass wafers.) |
|---|---|
| Range of motion |
R：470㎜(maximum arm reach,excluding end-effector) W：370°(±185° from Home pos) |
| Repeatability | XY：±0.1mm or less（3σ) Z：±0.05mm or less（3σ) |
| Wafer holding method | Selectable from options |
| Wafer hold check | Vacuum sensor with digital display |
| Communication | RS232C,RS-485 |
| Utility |
Driver power：DC24V±5％ 10A Control power：DC24V±5％ 3.15A Vacuum：-80 kPa or less 15L/min or less 1line (φ6 × φ4 polyurethane tube one-touch fitting connected) |
| Mass |
Main body:Appox.35kg |
Contact us for questions about products.
