MPL-ZN2
Engineered for low vibration and low noise, this robot supports the next generation of semiconductor fabrication equipment.
Features
- Compliant with 10^-1Pa vacuum environments by adapting servo motor on all axes and unique structure.
- Contact us for materials of end effector and wafer contact portion.
Specifications
| Handling object |
φ100mm to φ300mm SEMI/JEIDA standard wafer. (Please inquire with regard to special wafers such as glass wafers.) 6inch MASK |
|---|---|
| Range of motion | R：480㎜(maximum arm reach,excluding end-effector) T：370°(±185° from Home pos) |
| Repeatability | R：±0.1mm or less（3σ) |
| Handling system | Recess(Pocket) |
| Handling hold check | N/A |
| Vacuum isolation level | 10^-1Pa |
| Communication | RS-232C(Serial Interface) |
| Utility |
Driver power：DC24V±5％ 10A Control power：DC24V±5％ 3.15A |
| Mass |
Main body:Appox.25kg Controller(MCQ)：Appox.5kg |
Contact us for questions about products.
