Features
- Configurable for compound semiconductor wafers and glass wafers.(Please inquire us for details)
- Clean alignment enabled by limiting contact to the wafer edge.
- Notch/Flat are automatically recognized, eliminating the need for host controller settings.
- Buil-in controller for a compact design.
Specifications
| Handling object |
φ200mm SEMI/JEIDA standard wafer. |
| Alignment time |
8.0seconds or less (20.0seconds of less when separate chucking required) |
| Alignment accuracy |
θ：±0.2° or less（3σ) |
| Wafer off-center limit |
±2mm or less (Wafer offset from chuck center) |
| Wafer holding method | Edge hold |
| Wafer hold check | Photo micro sensor |
| Communication |
RS-232C(Serial Interface) |
| Utility |
Power:DC24V±10％ 5A 1line Dry air:φ6mm 0.12MPa to 0.2MPa 1line |
| Mass | Main body:Appox.8kg |
Contact us for questions about products.
