Features
- Mapping sensor availables as an optin.
- Adopted air-tight Ferromagnetic fluid sealing.
- Class 1 particle-free robot (exhaust duct type)
- Z-axis is built in, and requires no cassette elevator.
- Compact design:smallest and lightest in the class.
- Enables fast smooth transferring with 5-phase stepping motor ans optimum acceleration control.
- Achieved excellent rectilinearity of the arms with high rigidity ans unique drive system.
Specifications
| Handling object |
φ100mm to φ200mm SEMI/JEIDA standard wafer. (Please inquire with regard to special wafers such as glass wafers.) |
|---|---|
| Range of motion |
R1,R2：250㎜(maximum arm reach,excluding end-effector) Z：300㎜ |
| Repeatability |
R1,R2：±0.1mm or less（3σ) T：±0.05deg or less（3σ) |
| Wafer holding method | Selectable from options |
| Wafer hold check | Vacuum sensor with digital display |
| Communication | RS232C,RS-485 |
| Utility |
Driver power：DC24V±5％ 8A Control power：DC24V±5％ 3.15A Vacuum：-80 kPa or less 15L/min or less 1line (φ6 × φ4 polyurethane tube one-touch fitting connected) |
| Mass |
Main body:Appox.25kg Controller(NT＊R)：Appox.5kg |
Contact us for questions about products.
