NQS-1

This high-speed, ultra-clean robot is TAZMO standarad model of single-arm 300mm wafer transfer robot.

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Features

  • Servo motor on all axes sine-curve motion profiling for smooth transfers at high-speed and high-accuracy.
  • Mapping sensor availables as an optin.

Specifications

Handling object

φ100mm to φ300mm SEMI/JEIDA standard wafer.

(Please inquire with regard to special wafers such as glass wafers.)

Range of motion

R1:348㎜(maximum arm reach,excluding end-effector)
T:340°(±170° from Home pos)

Z:330㎜

Repeatability

R1:±0.1mm or less(3σ)

T:±0.05mm or less(3σ)
Z:±0.05mm or less(3σ)

Wafer holding method Selectable from options
Wafer hold check Vacuum sensor with digital display
Communication RS232C,RS0485
Utility

Power:1φ AC100V 7.5A 1line

         :1φ AC208V 5.0A 1line

Vacuum:-80 kPa or less 1line

(φ6 × φ4 polyurethane tube one-touch fitting connected)

Mass

Main body:Appox.38kg

Controller(MCQ):Appox.18kg

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