New MX2000
New MX2000 is for CMP slurry dilution, mixture and distribution. An unique "pump-less" supply system prevnts agglomeration of abrasive particles. We have sales record of over 20 years which contributes to the realization of high availability and stable production at many semiconductor factories.
Features
・Original Vacuum / Pressurize technology
・Multiple CMPs can be plumbed from one (1) New MX2000
・Smart touch panel operation
・Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging
・High maintenability such as manual operation and automatic flushing
・Various customization such as Pump supply option and 1 to 1 local supply are available
・Peripheral units such as Drum cabinets, Valve boxes, Process monitoring devices, Filters, Electorical power panels and System monitoring panels are available
Specifications
Contact us for questions about products.
