Powder oxidizer (APS) Dissolute/Distribution System
Compatible with the powder oxidizer (APS) used for metal CMP process. It enables on-site dissolution of powder, concentration control and supply to CMP.
Features
・Drum cabinet with Powder dissolute function
・Supply unit is either New MX2000 or iSIS1200J
・Multiple CMPs can be plumbed from one (1) supply unit
・Original Vacuum / Pressurize technology
・Smart touch panel operation
・Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging
・High maintenability such as manual operation and automatic flushing
・Concentration monitor and chemical filter applied
・Various customization such as changing bottle size of APS powder are available
・Peripheral units such as Valve boxes, Electorical power panels and System monitoring panels are available
Specifications
Contact us for questions about products.
