iSIS1200J
Each of the two cabinets of iSIS1200J has a mixing section, a supplying section and the supplying tank. It enables flexible operations such as down time-less operation with redundancy, back up for maintenance, and supplying 2 kinds of slurry by 1 system.
Features
・Dual system for mixing and supplying
・Original Vacuum / Pressurize technology
・Multiple CMPs can be plumbed from one (1) iSIS1200J
・Smart touch panel operation
・Useful system monitoring functions such as alarm history, drum bar-code management and operation data logging
・High maintenability such as manual operation and automatic flushing
・Various customization such as Pump supply option and 1 to 1 local supply are available
・Peripheral units such as Drum cabinets, Valve boxes, Process monitoring devices, Filters, Electorical power panels and System monitoring panels are available
Specifications
Contact us for questions about products.
