NISON®1800
NISON®1800 is well known as a proven system for phosphoric acid processes as a long seller. Analyzed mechanism of Nitride etching in order to control etching digitally, not by empirically. Which makes NISON®1800 as a de facto standard of semiconductor manufacturers
Features
・Proved process performance by long sales record.
・Stable high etching rate by boiling control of process bath
・Dual type NISON®1800 which controls 2 process baths is available
Specifications
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